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Problem

Thin-film thickness: choosing a measurement

Which technique fits depends on the film: its thickness range, whether it is transparent, how many layers the stack has, how smooth it is and whether the sample may be cut. Optical and X-ray methods are non-destructive but rely on a model; a prepared cross-section gives a local view of the layers and alters the sampled region.

What usually has to be established

  • The nominal thickness range and the number of layers
  • Whether the film is transparent or absorbing, and on which substrate
  • Whether thickness alone is enough, or density, roughness or optical constants are needed as well

Measurements

Where an investigation often starts.

Compare alternative or complementary routes. The choice depends on your sample and the information you need.

Which thickness measurement fits your sample?

Start with the layer stack, surface and permission to prepare the sample.

  1. Light can probe the layer

    Ellipsometry

    Thickness + optical constants

    Needs an optical model; unknown layers and roughness can make the fit ambiguous.

  2. Flat, smooth layered surface

    X-ray reflectivity

    Thickness + density + roughness

    Needs a layer model and sufficient contrast between interfaces.

  3. A local image is needed

    TEM cross-section

    A direct view of layer boundaries

    Requires a thin specimen; preparation alters the region and the view is local.

These routes can complement each other. The laboratory confirms the usable thickness range, preparation and uncertainty for your sample.

What to have ready

  • Substrate, layer materials and the nominal stack
  • Expected thickness of each layer
  • Sample size and flatness
  • How many samples, and whether one point or a map across the sample is needed

Potential Dutch, Belgian and German facilities

119 facilities publish at least one of these measurements in Berlin, Dresden, Hannover, Aachen, Delft, Eindhoven, Hamburg, Planegg, Amsterdam, Bayreuth, Braunschweig, Dortmund, Düsseldorf, Enschede, Freiburg, Ghent, Greifswald, Groningen, Heidelberg, Jena, Köln, Leipzig, Louvain-la-Neuve, Mülheim an der Ruhr, Namur, Potsdam, Rostock, Saarbrücken, Tübingen, Antwerp, Bad Nauheim, Bochum, Bonn, Denkendorf, Diepenbeek, Eggenstein-Leopoldshafen, Essen, Frankfurt (Oder), Frankfurt am Main, Freiberg, Garching, Geesthacht, Gießen, Halle, Halle (Saale), Ilmenau, Jülich, Karlsruhe, Kiel, Leiden, Leuven, Liège, Maastricht, Magdeburg, Mainz, Marburg, Münster, Nijmegen, Noordwijk, Oldenburg, Osnabrück, Paderborn, Petten, Potsdam-Golm, Rüsselsheim am Main, Schwäbisch Gmünd, Stuttgart, Ulm, Utrecht, Wageningen and Würzburg.

Leads are based on published capabilities; current suitability and availability must be confirmed with the laboratory.

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